Double-sided YBa/sub 2/Cu/sub 3/O/sub 7-/spl part// films for planar high-power filters

Abstract

We have extended the planar DC high oxygen-pressure sputtering process for the successive non-scanning deposition of epitaxial YBa/sub 2/Cu/sub 3/O/sub 7-/spl part// (YBCO) films up to 2" in diameter and 600 nm in thickness. Contamination of the heater-facing side of the LaAlO/sub 3/ substrates could be prevented by use of a thin quartz glass plate. For… (More)

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