Dome Shaped Touch Sensor Using PZT Thin Film made by Hydrothermal Method

We propose a dome shaped touch sensor unit, which is small and is applicable in high temperature environment. The PZT thin film was made on the halfround Ti substrate, and the electrodes were deposited on its surface to form the sensor and driving actuator. The PZT thin film was made on the curved surface of the substrate by the hydrothermal method. The… CONTINUE READING