Dissolution behavior of fluoroalcohol substituted polystyrenes

  title={Dissolution behavior of fluoroalcohol substituted polystyrenes},
  author={Daniel S. Halla and Brian Osborna and Kyle Pattersona and Sean D. Burnsb and C Grant Willson},
α-Fluoroalcohols have been proposed as transparent, base-soluble functional groups for use in the design of new 157 nm photoresist polymers. The two most common and easily prepared fluoroisopropanol groups are bis-trifluoromethyl carbinols (hexafluoroalcohol) and methyl-trifluoromethyl carbinols (trifluoroalcohol). This paper describes studies designed to… CONTINUE READING