Directed Self-Assembly (DSA) Template Pattern Verification

@article{Xiao2014DirectedS,
  title={Directed Self-Assembly (DSA) Template Pattern Verification},
  author={Zigang Xiao and Yuelin Du and Haitong Tian and Martin D. F. Wong and He Yi and H.-S. Philip Wong and Hongbo Zhang},
  journal={2014 51st ACM/EDAC/IEEE Design Automation Conference (DAC)},
  year={2014},
  pages={1-6}
}
Directed Self-Assembly (DSA) is a promising technique for contacts/vias patterning, where groups of contacts/vias are patterned by guiding templates. As the templates are patterned by traditional lithography, their shapes may vary due to the process variations, which will ultimately affect the contacts/vias even for the same type of template. Due to the complexity of the DSA process, rigorous process simulation is unacceptably slow for full chip verification. This paper formulate several… CONTINUE READING
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Computational simulation of block copolymer directed self-assembly in small topographical guiding templates

H. Yi, A. Latypov, H.-S.P. Wong
SPIE Advanced Lithography. International Society for Optics and Photonics • 2013
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