Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

In this paper, we report the first thermal nano-imprint fabrication of low loss As<inf>2</inf>S<inf>3</inf> Chalocgenide glass waveguides. As<inf>2</inf>S<inf>3</inf> rib waveguides 2–4µm wide and 1µm high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.