Direct X-Ray Imaging of µm Precision Using Back-Illuminated Charge-Coupled Device

@article{Miyata2002DirectXI,
  title={Direct X-Ray Imaging of µm Precision Using Back-Illuminated Charge-Coupled Device},
  author={Emi Miyata and Masami Miki and Hiroshi Tsunemi and Junko S. Hiraga and Hiroshi Miyaguchi},
  journal={Japanese Journal of Applied Physics},
  year={2002},
  volume={41},
  pages={500}
}
A charge-coupled device (CCD) is a standard imager in optical region in which the image quality is limited by its pixel size. CCDs also function in X-ray region but with substantial differences in performance. An optical photon generates only one electron while an X-ray photon generates many electrons at a time. We developed a method to precisely determine the X-ray point of interaction with subpixel resolution. In particular, we found that a back-illuminated CCD efficiently functions as a fine… Expand
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