Direct-Writing of Cu Nano-Patterns with an Electron Beam

  title={Direct-Writing of Cu Nano-Patterns with an Electron Beam},
  author={Shih-En Lai and Ying-Jhan Hong and Yu-Ting Chen and Yu-Ting Kang and Pin Chang and Tri‐Rung Yew},
  journal={Microscopy and Microanalysis},
  pages={1639 - 1643}
Abstract We demonstrate direct electron beam writing of a nano-scale Cu pattern on a surface with a thin aqueous layer of CuSO4 solution. Electron beams are highly maneuverable down to nano-scales. Aqueous solutions facilitate a plentiful metal ion supply for practical industrial applications, which may require continued reliable writing of sophisticated patterns. A thin aqueous layer on a surface helps to confine the writing on the surface. For this demonstration, liquid sample holder (K-kit… Expand
OF THESIS ELECTRON BEAM INDUCED DEPOSITION OF HIGHLY CONDUCTIVE COPPER NANOWIRES FROM BULK LIQUIDS Electron-beam induced deposition (EBID) is a position-controlled technique that can directlyExpand
Focused electron beam induced deposition of copper with high resolution and purity from aqueous solutions.
Electron-beam induced deposition of high-purity copper nanostructures from aqueous solutions of copper sulfate with evidence for radiation-chemical deposition mechanisms was observed, including deposition efficiency as high as 1.4 primary electrons/Cu atom. Expand
A Novel Microchip Technique for Quickly Identifying Nanogranules in an Aqueous Solution by Transmission Electron Microscopy: Imaging of Platelet Granules
Ultrastructural observation of biological specimens or nanogranules usually requires the use of electron microscopy. Electron microscopy takes a lot of time, requires many steps, and uses manyExpand
Stable water layers on solid surfaces.
The results indicate that the water layer forms naturally and is closely associated only with the surface to which it adheres, which may shed light on topics from gas exchange in alveoli in biology to the post-wet-process control in the semiconductor industry. Expand
Nanomaterials for treating cardiovascular diseases: A review
This review provided an overview of necessary knowledge and key concerns on nanomaterials specific for treating cardiovascular diseases, from the perspectives of both material science and biomedicine. Expand


Focused-electron-beam-induced deposition of freestanding three-dimensional nanostructures of pure coalesced copper crystals
We report on direct writing of three-dimensional freestanding nanostructures of Cu by use of a focused electron beam (FEB) and the metalorganic precursor hfac-Cu-TMVS. Freestanding horizontal rodsExpand
Electron-beam-induced deposition of platinum from a liquid precursor.
Liquid-phase EBID offers a new route to deterministic, three-dimensional, nanometer-scale structures composed of multiple materials without complex multistep processing and may prove important for prototyping and low-volume production of nanoscale devices and for repair and modification of nanoscope masks and templates used in high- volume production. Expand
Liquid Phase Electron-Beam-Induced Deposition on Bulk Substrates Using Environmental Scanning Electron Microscopy
The inclusion of surfactants is shown to drastically improve pattern replication without diminishing the purity of the metal deposits and to reduce the droplet contact angle to below ~10°. Expand
Capsule-free fluid delivery and beam-induced electrodeposition in a scanning electron microscope
Gold coated borosilicate nanocapillaries are used to locally deliver aqueous, electrolytic CuSO4 solution into the low vacuum chamber of an environmental scanning electron microscope (ESEM).Expand
Electron beam manipulation of gold nanoparticles external to the beam
The electron beam (e-beam) of transmission electron microscopy (TEM) was utilized for in situ synthesizing and manipulating Au nanoparticles with various sizes in HAuCl4 aqueous solution. The drivingExpand
Electron-beam-induced deposition of gold from aqueous solutions.
It is shown that the purity of gold deposited using these liquid precursors is significantly improved in comparison with deposits from metal-organic gaseous Precursors. Expand
Patterned electrochemical deposition of copper using an electron beam
We describe a technique for patterning clusters of metal using electrochemical deposition. By operating an electrochemical cell in the transmission electron microscope, we deposit Cu on Au underExpand
CuCl2-based liquid electrolyte precursor for laser-induced metal deposition
The possibility of the copper precipitation from the CuCl2-based liquid electrolyte precursor on the SiO2 substrates with Laser-induced Chemical Liquid phase Deposition (LCLD) method has beenExpand
Growth characterization of electron-beam-induced silver deposition from liquid precursor
Deposits of aggregated silver particles were grown from aqueous silver-nitrate solution by electron-beam induced deposition in a liquid cell in a scanning electron microscope. Electron energies of 2,Expand
Bubble and pattern formation in liquid induced by an electron beam.
The conditions under which hydrated electrons cause precipitation of cations from solution are discussed and it is shown that the electron beam can be used to "write" structures directly, such as nanowires and other complex patterns, without the need for a mask. Expand