• Corpus ID: 203626736

Digitally Programmable Higher-order Harmonic Generation Using Nonlinear MEMS Resonator

  title={Digitally Programmable Higher-order Harmonic Generation Using Nonlinear MEMS Resonator},
  author={Gayathri Pillai and Sheng-Shian Li},
  journal={arXiv: Applied Physics},
A fully electrically interfaced chip-scale Micro-Electro-Mechanical System based higher-order harmonic generator has multitudes of applications as it can simultaneously facilitate monolithic integration with on-chip electronics and offer microscopic footprint in comparison with the bulky and expensive high-order harmonic generation setup in optics. Here we report the first demonstration of a record-high harmonics generation over 100 tones using a thin-film Lead Zirconate Titanate flexural mode… 

Figures from this paper

Nonlinearity Driven Higher Order Harmonics in CMOS-MEMS Resonators
  • K. Bhosale, Gayathri Pillai, Sheng-Shian Li
  • Engineering
    2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
  • 2020
In this work, we explore the generation of higher order harmonics in an electrostatically actuated wide-width beam resonator fabricated by a CMOS-MEMS Titanium Nitride Composite (TiN-C) platform. The


Integrated acousto-optic polarization converter in a ZX-cut LiNbO(3) waveguide superlattice.
An integrated acousto-optic polarization converter exploiting a novel surface acoustic superlattice (S-ASL) transducer made of a ZX-cut periodically poled lithium niobate crystal with uniform coplanar electrodes for surface acoustic wave (SAW) generation is reported.
Frequency stabilization in nonlinear micromechanical oscillators.
It is demonstrated that, by coupling two different vibrational modes through an internal resonance, it is possible to stabilize the oscillation frequency of nonlinear self-sustaining micromechanical resonators.
High-stiffness driven micromechanical resonators with enhanced power handling
A two-port silicon-based micromechanical beam resonator driven at its high-stiffness locations has been proposed with enhanced power handling as compared with the same resonator but using
Monolithic piezoelectric Aluminum Nitride MEMS-CMOS microphone
A monolithic piezoelectric Aluminum Nitride (AlN) MEMS-CMOS microphone for high-sensitivity, low-power applications is presented. The MEMS microphone that is directly bonded to a CMOS buffer for
The Effect of High Order Non-Linearities on Sub-Harmonic Excitation With Parallel Plate Capacitive Actuators
Electrostatic actuation of motion is commonly used in resonant MEMS. Drive signal feed-through is undesirable as it masks the detection signal. This paper reports analysis and demonstration of a
Plasmon-assisted high-harmonic generation in graphene
These results support the strong potential of nanostructured graphene as a robust, electrically tunable platform for high-harmonic generation and demonstrate through rigorous time-domain simulations that the synergistic combination of strong plasmonic near-field enhancement and a pronounced intrinsic nonlinearity result in efficient broadband high- Harmonic generation within a single material.
Nonlinear integrated quantum electro-optic circuits
An integrated chip with quantum state generation, active polarization manipulation, and precise time control is demonstrated, revealing that it has full flexible control over single-qubit operations by harnessing the complete potential of fast on-chip electro-optic modulation.
Magnetic Tuning of Nonlinear MEMS Electromagnetic Vibration Energy Harvester
Ambient mechanical vibrations are an untapped yet attractive energy source for powering wireless sensor nodes in the upcoming Internet-of-Things. Here we demonstrate the magnetically induced
A nanometre-scale mechanical electrometer
The mechanical detection of charge has a long history, dating back more than 200 years to Coulomb's torsion-balance electrometer. The modern analogues of such instruments are semiconductor-based
Plasmon-enhanced high-harmonic generation from silicon
High-harmonic emission from crystalline silicon can be made ten times brighter by exploiting local plasmonic fields in arrays of nano-antennas. Plasmonic antennas can enhance the intensity of a