Digital holography microscopy (DHM): fast and robust systems for industrial inspection with interferometer resolution

@inproceedings{Emery2005DigitalHM,
  title={Digital holography microscopy (DHM): fast and robust systems for industrial inspection with interferometer resolution},
  author={Y. Emery and E. Cuche and F. Marquet and Nicolas Aspert and P. Marquet and Jonas Kuhn and M. Botkine and T. Colomb and F. Montfort and F. Charri{\'e}re and C. Depeursinge},
  booktitle={SPIE Optical Metrology},
  year={2005}
}
  • Y. Emery, E. Cuche, +8 authors C. Depeursinge
  • Published in SPIE Optical Metrology 2005
  • Engineering, Materials Science
  • With the recent technological advances, there is an increasing need for measurement systems providing interferometer resolution for inspection of large quantities of individual samples in manufacturing environments.. Such applications require high measurement rates, robustness, ease of use, and non-contact systems. We show here that Digital Holographic Microscopy (DHM), a new method that implements digitally the principle of holography, is particularly well suited for such industrial… CONTINUE READING

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