Digital-controlled MEMS vibratory-beam-accelerometer

Abstract

This report provides a MEMS (micro-electromechanical systems) vibratory beam accelerometer (VBA) having a digital control system. The device structure with size of 5 times 5 mm<sup>2</sup> includes a frame, heavy mass, thick suspension beams, and thin vibrating beams made of silicon. The VBA measures acceleration using the resonant frequency change of the… (More)

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