Diffusion Selfaligned MOST; A New Approach for High Speed Device

@article{Tarui1969DiffusionSM,
  title={Diffusion Selfaligned MOST; A New Approach for High Speed Device},
  author={Y. Tarui and Y. Hayashi and T. Sekigawa},
  journal={The Japan Society of Applied Physics},
  year={1969}
}
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