Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands.

  title={Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands.},
  author={R. Heilmann and Minseung Ahn and A. Bruccoleri and Chih-Hao Chang and E. Gullikson and P. Mukherjee and M. Schattenburg},
  journal={Applied optics},
  volume={50 10},
We report on measurements of the diffraction efficiency of 200-nm-period freestanding blazed transmission gratings for wavelengths in the 0.96 to 19.4 nm range. These critical-angle transmission (CAT) gratings achieve highly efficient blazing over a broad band via total external reflection off the sidewalls of smooth, tens of nanometer thin ultrahigh aspect-ratio silicon grating bars and thus combine the advantages of blazed x-ray reflection gratings with those of more conventional x-ray… Expand
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