Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands.

@article{Heilmann2011DiffractionEO,
  title={Diffraction efficiency of 200-nm-period critical-angle transmission gratings in the soft x-ray and extreme ultraviolet wavelength bands.},
  author={R. Heilmann and Minseung Ahn and A. Bruccoleri and Chih-Hao Chang and E. Gullikson and P. Mukherjee and M. Schattenburg},
  journal={Applied optics},
  year={2011},
  volume={50 10},
  pages={
          1364-73
        }
}
We report on measurements of the diffraction efficiency of 200-nm-period freestanding blazed transmission gratings for wavelengths in the 0.96 to 19.4 nm range. These critical-angle transmission (CAT) gratings achieve highly efficient blazing over a broad band via total external reflection off the sidewalls of smooth, tens of nanometer thin ultrahigh aspect-ratio silicon grating bars and thus combine the advantages of blazed x-ray reflection gratings with those of more conventional x-ray… Expand
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Diffraction gratings are fundamental optical elements that separate incident light into its constituent wavelength components. This dispersive feature of diffraction gratings has been broadlyExpand
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We have developed a new type of soft x-ray diffraction grating. This critical-angle transmission (CAT) grating combines the advantages of traditional transmission gratings (low mass, extremelyExpand
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TLDR
The performance of a critical-angle transmission (CAT) grating in the EUV and soft x-ray band is demonstrated that for the first time combines the advantages of transmission gratings with the superior broadband efficiency of blazed reflection gratings via reflection from nanofabricated periodic arrays of atomically smooth nanometer-thin silicon mirrors. Expand
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TLDR
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TLDR
Efficiency measurements of a grazing-incidence diffraction grating in the off-plane mount were performed using polarized synchrotron radiation, offering the possibility of performing unique science studies of astrophysical, solar, and laboratory sources by exploiting the polarization sensitivity of the off -plane grating. Expand
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