Dielectric Filter Production with in situ Broadband Optical Monitoring

@inproceedings{Zueger2010DielectricFP,
  title={Dielectric Filter Production with in situ Broadband Optical Monitoring},
  author={Othmar Zueger},
  year={2010}
}
An in situ broadband optical monitoring is used in a magnetron sputtering system for dielectric filter manufacturing. The spectrometer is synchronized with the substrates motion and measures the reflection of the coating during the deposition process.