• Corpus ID: 118046368

Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry

@article{Benedikt2011DiagnosticsOL,
  title={Diagnostics of low and atmospheric pressure plasmas by means of mass spectrometry},
  author={Jan Benedikt and Dirk Ellerweg and Achim von Keudell},
  journal={arXiv: Plasma Physics},
  year={2011}
}
The knowledge of absolute fluxes of reactive species such as radicals or energetic ions to the surface is crucial for understanding the growth or etching of thin films. These species have due to their high reactivity very low densities and their detection is therefore a challenging task. Mass spectrometry is a very sensitive technique and it will be demonstrated that it is a good choice for the study of plasma chemistry. Mass spectrometry measures the plasma composition directly at the surface… 

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