• Materials Science
  • Published 2010

Device suspended beam and means of piezoresistive sensing movement thereof, and method of manufacture of the device

@inproceedings{Hentz2010DeviceSB,
  title={Device suspended beam and means of piezoresistive sensing movement thereof, and method of manufacture of the device},
  author={S{\'e}bastien Hentz and Philippe Andreucci and {\'E}ric Colinet and Laurent Duraffourg and S{\'e}bastien Labarthe},
  year={2010}
}
Device suspended beam and piezoresistive sensor means of displacement thereof, and method of manufacturing the device. The device comprises: a support (14); a suspended beam (16) moving parallel to the support plane; and means (18) for detecting the displacement, comprising at least two piezoresistive gauges (20, 22) that are not in the extension of one another. According to the invention, the beam is suspended by means of the detection means