Development of wide-band low-frequency MEMS vibration energy harvester for utility infrastructure core monitoring system

Abstract

An aluminum-nitride (AlN) based energy-harvesting MEMS sensor is developed. We aimed at realizing energy-harvesting sensor with functional feature of wide-band response at low-frequency vibration domain, owing to the high-power density of vibration sources energy in a particular low frequency with several Hz deviations. By simplifying and analyzing the… (More)

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