Development of visual inspection system for detecting surface defects on sensor chip

@article{Nurhadiyatna2017DevelopmentOV,
  title={Development of visual inspection system for detecting surface defects on sensor chip},
  author={Adi Nurhadiyatna and Sven Loncaric and Esa Prakasa and Edi Kurniawan and A. A. Khoirudin and Luciano Musa and Petra Reidler},
  journal={2017 International Conference on Computer, Control, Informatics and its Applications (IC3INA)},
  year={2017},
  pages={100-105}
}
This paper presents a visual inspection method based on image processing techniques. The method aims to detect surface defects found on pixel chip pads. Pixel chip is a tiny sensor used in Inner Tracking System (ITS) — a large particle detector of ALICE experiment (A Large Ion Collider Experiment). The chips record particle trajectories after collision event in the ITS system. In a mass production stage, the chip quality needs to be accurately inspected and assessed to ensure its technical… CONTINUE READING

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