Development of very large helicon plasma source

@inproceedings{Shinohara2004DevelopmentOV,
  title={Development of very large helicon plasma source},
  author={Shunjiro Shinohara and Takao Tanikawa},
  year={2004}
}
We have developed a very large volume, high-density helicon plasma source, 75 cm in diameter and 486 cm in axial length; full width at half maximum of the plasma density is up to ;42 cm with good plasma uniformity along the z axis. By the use of a spiral antenna located just outside the end of the vacuum chamber through a quartz-glass window, plasma can be initiated with a very low value of radio frequency~rf! power~,1 W!, and an electron density of more than 10 cm is successfully produced with… CONTINUE READING

Citations

Publications citing this paper.

Similar Papers

Loading similar papers…