Development of sputtering conditions for PZT micro actuator with high piezoelectric property by Au-Pt buffer layer


We developed a medical device to measure blood glucose levels automatically. This device is consisting of a micropump of PZT (Lead Zirconate Titanate) actuator to support during extraction of blood and administration of insulin. Thus, the micro-pump should be miniaturized because it needs to be mounted on the device, so that the device is not too big to be… (More)
DOI: 10.1109/MHS.2011.6102194


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