Development of polymer-based artificial haircell using surface micromachining and 3D assembly

@article{Chen2003DevelopmentOP,
  title={Development of polymer-based artificial haircell using surface micromachining and 3D assembly},
  author={J G Chen and J. Engel and Chang Liu},
  journal={TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)},
  year={2003},
  volume={2},
  pages={1035-1038 vol.2}
}
We report the development of an artificial haircell (AHC) fabricated using polymer surface micromachining and efficient 3D assembly. The AHC is modeled after biological hair cells, a common and versatile mechanoreceptor in biology. The design and fabrication process are discussed in the paper. Response to static deflection and airflow is also discussed. 
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