Development of new 3D pixel sensors for phase 2 upgrades at LHC

Abstract

We report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50×50 or 25×100 μm<sup>2</sup> pixel size) and extreme radiation hardness (up to a fluence of 2×10<sup>16</sup> n<sub>eq</sub> cm<sup>-2</sup>), thinner 3D sensors (~100 μm… (More)

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