Development of hard masks for reactive ion beam angled etching of diamond.

  title={Development of hard masks for reactive ion beam angled etching of diamond.},
  author={Cleaven Chia and B. Machielse and Amirhassan Shams-Ansari and Marko Lon{\vc}ar},
  journal={Optics express},
  volume={30 9},
Diamond offers good optical properties and hosts bright color centers with long spin coherence times. Recent advances in angled-etching of diamond, specifically with reactive ion beam angled etching (RIBAE), have led to successful demonstration of quantum photonic devices operating at visible wavelengths. However, larger devices operating at telecommunication wavelengths have been difficult to fabricate due to the increased mask erosion, arising from the increased size of devices requiring… 

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