Development of fast-scanning laser probe system based on knife-edge method for diagnosis of RF surface acoustic wave devices


This paper describes the development of a high-speed laser probe system for surface acoustic wave (SAW) devices. A fast scanning rate of 2.5 kS/s is realized by continuous stage translation and successive acquisition of the detector output by a high-speed data-logger. Trigger pulses are generated from the output of a high-precision linear-scale installed in… (More)


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