Development of advanced micromirror arrays by flip-chip assembly

  title={Development of advanced micromirror arrays by flip-chip assembly},
  author={M. Adrian Michalicek and V. M. Bright},
  booktitle={SPIE MOEMS-MEMS},
This paper presents the design, commercial prefabrication, modeling and testing of advanced micromirror arrays fabricated using a novel, simple and inexpensive flip-chip assembly technique. Several polar piston arrays and rectangular cantilever arrays were fabricated using flip-chip assembly by which the upper layers of the array are fabricated on a separate chip and then transferred to a receiving module containing the lower layers. Typical polar piston arrays boast 98.3% active surface area… CONTINUE READING

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