Development of active and slim edge terminations for 3D and planar detectors

@article{Betta2011DevelopmentOA,
  title={Development of active and slim edge terminations for 3D and planar detectors},
  author={Gian-Franco Dalla Betta and Alvise Bagolini and Maurizio Boscardin and Gabriele Giacomini and Marco Povoli and Elisa Vianello and Nicola Zorzi},
  journal={2011 IEEE Nuclear Science Symposium Conference Record},
  year={2011},
  pages={1334-1340}
}
We report novel solutions for the edge termination in silicon detectors. In the framework of a project aimed at the optimization of 3D detectors with active edge, we have developed both active edges using a single sided process with support wafer, and slim edges using a double sided process without support wafer. TCAD simulations and experimental tests have been carried out to validate and compare the proposed approaches. While active edges can provide a better sensitivity up to a few microns… CONTINUE READING
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