Development of a wide-tuning range and high Q variable capacitor using metal-based surface micromachining process

@inproceedings{Huang2009DevelopmentOA,
  title={Development of a wide-tuning range and high Q variable capacitor using metal-based surface micromachining process},
  author={I.-Yu Huang and Chian-Hao Sun and Han-Cheng Tasi and Che-Ya Chou and Chih-Sheng Huang},
  year={2009}
}
Abstract This study aims to improve the tuning range and quality-factor ( Q ) of micro variable capacitors for wireless communication applications. A suspending 0.5 μm-thick gold thin-plate with two-gap structure in one-to-three ratio of spacing is designed for the maximization of tuning range. To enhance effectively the flexural rigidity of top metal-plate and improve further the tuning range of the varactor, a double-cross-type microstructure with two vertical fixed-fixed beam springs and… CONTINUE READING