Development of a self-aligned etch-back process for selectively doped silicon solar cells


Selectively doped (SD) solar cells have advantages of lower front diffusion recombination, lower contact resistivity and better blue response. In this work, a simple, self-aligned SD solar cell process is presented, eliminating the critical mask alignment step in current SD solar cells. In the new process, the front metal grid is deposited on top of a heavy… (More)

7 Figures and Tables


  • Presentations referencing similar topics