Development of a flexure-based 3-RRR parallel mechanism for nano-manipulation

Abstract

This paper presents the mechanical design methodologies of a 3-DOF flexure-based mechanism. A 3-RRR parallel mechanism is utilized to implement planar motions which are general requirements for micro/nano manipulation. Flexure hinges are used as the revolute joints to provide smooth motion in the range of micrometer. Three high performance piezoelectric… (More)

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