Development of a Palm-size Electron Probe X-ray Analyzer


An electron probe microanalyzer (EPMA) with a palm-size chamber including the electron source and the sample stage was developed using a pyroelectric crystal. Energy of obtained continuous X-rays and lower limits of detection of transition metals (titanium, iron, and nickel) were evaluated. End point energy (Duane-Hunt limit) of obtained continuous X-rays… (More)


2 Figures and Tables