Development of a PZT MEMS Switch Architecture for Low-Power Digital Applications

  title={Development of a PZT MEMS Switch Architecture for Low-Power Digital Applications},
  author={Robert M. Proie and Ronald Polcawich and Jeffrey S. Pulskamp and Tony G. Ivanov and Mona E. Zaghloul},
  journal={Journal of Microelectromechanical Systems},
A lead zirconate titanate (PZT) microelectromechanical systems (MEMS) digital switch was designed as a low-power low-frequency control system intended to create energy-efficient microcontrollers, control higher voltage systems, and provide integrated control over other MEMS platforms. In addition, the technology is inherently insensitive to high energy radiation and has been shown to operate over a wide range of temperatures. Initial devices were fabricated with three design variables of… CONTINUE READING
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Low voltage complementary MEMS logic using piezoelectric actuators

  • D. Judy, R. Polcawich, J. Pulskamp
  • Proc. Solid-State Sens., Actuators, Microsyst…
  • 2008
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