Development of a MEMS rotation sensor for oilfield applications

@article{Projetti2014DevelopmentOA,
  title={Development of a MEMS rotation sensor for oilfield applications},
  author={Maxime Projetti and Olivier Vancauwenberghe and Hans Paulson and Nicolas Goujon and Fr{\'e}d{\'e}ric Marty and Denis Aubry},
  journal={IEEE SENSORS 2014 Proceedings},
  year={2014},
  pages={1595-1598}
}
A new capacitive microelectromechanical rotation sensor (R-MEMS) with very high performances (low noise, high bandwidth) was developed for oilfield applications. After a thorough design phase based on analytical, finite element and MATLAB/Simulink models, the first R-MEMS prototypes were microfabricated using an optimized deep reactive ion etching (DRIE… CONTINUE READING