Development of a MEMS rotation sensor for oilfield applications

A new capacitive microelectromechanical rotation sensor (R-MEMS) with very high performances (low noise, high bandwidth) was developed for oilfield applications. After a thorough design phase based on analytical, finite element and MATLAB/Simulink models, the first R-MEMS prototypes were microfabricated using an optimized deep reactive ion etching (DRIE… CONTINUE READING