Development of a Laser-Spark Multicharged Ion System – Application in Shallow Implantation of Sic by Boron and Barium

@inproceedings{Shaim2018DevelopmentOA,
  title={Development of a Laser-Spark Multicharged Ion System – Application in Shallow Implantation of Sic by Boron and Barium},
  author={Md. Haider Ali Shaim},
  year={2018}
}
DEVELOPMENT OF A LASER-SPARK MULTICHARGED ION SYSTEM – APPLICATION IN SHALLOW IMPLANTATION OF SIC BY BORON AND BARIUM Md. Haider Ali Shaim Old Dominion University, 2018 Director: Dr. Hani E. Elsayed-Ali A novel multicharged ion source, using laser ablation induced plasma coupled with spark discharge, has been investigated in this work. The designed and demonstrated ion source is costeffective, compact and versatile. Experiments are described with the intention of demonstrating the… CONTINUE READING

References

Publications referenced by this paper.
SHOWING 1-10 OF 164 REFERENCES

Spark discharge coupled laser multicharged ion source.

  • The Review of scientific instruments
  • 2015
VIEW 21 EXCERPTS
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