Development of a Dual-SPDT RF-MEMS switch for Ku-band

  title={Development of a Dual-SPDT RF-MEMS switch for Ku-band},
  author={Daisuke Yamane and Winston Sun and Hiroyuki Fujita and Hiroshi Toshiyoshi and Shigeo Kawasaki},
  journal={2010 IEEE Radio and Wireless Symposium (RWS)},
This paper presents the design, fabrication method and measurement results on a low-loss Ohmic-contact RF-MEMS switch with a bi-lateral actuation for a Dual-SPDT switching system. The switch was fabricated based on the silicon bulk-micromachining technology and a layer-wise technique on an SOI wafer. We demonstrated a compatibility with electroplating and high aspect-ratio Deep-RIE process to have loss-less quasi-air-suspended MEMS waveguides and adequately thick gold layer for side-wall ohmic… CONTINUE READING
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RF MEMS Phase Shifters: Design and Applications

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