Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning

@inproceedings{Kesters2015DevelopmentOA,
  title={Development of a Cu and W Compatible PERR Clean in BEOL Advanced Interconnect Patterning},
  author={Els Kesters and Quoc Le and Stefan Decoster and Victor Vega Gonzalez and Frank Holsteyns and Stefan De Gendt},
  year={2015}
}