Development of a 6 degree of freedom robotic micromanipulator for use in 3D MEMS microassembly


This paper describes the design and development of a 6 degree of freedom robotic manipulator used in the assembly of three-dimensional MEMS (micro electromechanical systems) microstructures. The robot employs a highly innovative mechanical design for the rotational axes to provide unprecedented access to a microchip substrate for microassembly operations… (More)
DOI: 10.1109/ROBOT.2006.1641725


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Citations per Year

Citation Velocity: 6

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