Development of SPDT-structured RF MEMS switch

  title={Development of SPDT-structured RF MEMS switch},
  author={Yutaka Uno and K. Narise and Takemasa Masuda and Katsuyuki Inoue and Yoshitaka Adachi and Ken'ichi Hosoya and Tomonori Seki and Fumikazu Sato},
  journal={TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference},
Here, we propose a practical single pole double throw (SPDT)-structured radio frequency microelectromechanical system (RF MEMS) switch for RF applications. This SPDT switch has a very low insertion loss of 1.0dB and a high isolation of 40dB, up to 10GHz. The fabricated switch is compact in size (5.2×3.0×1.8 mm3) with a Land Grid Array Package. The research and development of an RF MEMS switch has been ongoing in our laboratory for years, and we have achieved practical reliability by using a low… CONTINUE READING
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Development of a large-force low-loss metal-contact RF MEMS switch

  • T. Seki
  • Sensor Actuator,
  • 2006

Low-Loss SPDT Metal-to-metal Contacts RF MEMS Switch operated by electrostatic actuation

  • T.Seki
  • Proc. SPIE,
  • 2005

Life-time Characteristics of Ohmic MEMS Switches

  • J. Maciel, S. Majumder, R. Morrison, J. Lampen
  • Proc. SPIE vol
  • 2004

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