Development of Mems Angular Rate Sensor for High-dynamics Applications

Abstract

In this paper, presented are a design and test results of MEMS angular rate sensor of wide input range and wide bandwidth. Open loop performances of conventional MEMS rate sensor are very limited because of its nonlinear input-output relationship and very small bandwidth. In this study, a phase lead control scheme is applied to enlarge the operating range… (More)

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Cite this paper

@inproceedings{Sung2005DevelopmentOM, title={Development of Mems Angular Rate Sensor for High-dynamics Applications}, author={Woon-Tahk Sung and Jang Gyu Lee and Taesam Kang and H Jang}, year={2005} }