Development of Film Actuator Operated by Magnetic Field for Micro-Machine


Fe-Pd alloy films, prepared by using a DC magnetron sputtering method, were developed as a high sensitive actuator, which was driven by the magnetic field. Fe-Pd alloy film shows large magnetostriction and high magnetostrictive susceptibility under 1 kOe. To evaluate the moving potential as magneto-driving actuator, the magnetostrictive properties were measured under different tensile loading stresses. Although the small tensile loading stress decreased the maximum value of magnetostriction, strong magneto-driving actuator of the Fe-Pd alloy film could be constantly operated by the magnetic field under larger loading stress for high magnetostrictive susceptibility.

Cite this paper

@inproceedings{Yabe2003DevelopmentOF, title={Development of Film Actuator Operated by Magnetic Field for Micro-Machine}, author={Hiromasa Yabe and Yoshitake Nishi}, year={2003} }