Development and characterization of CMOS-based monolithic X-ray imager sensor

Abstract

We proposed a new design of CMOS-based X-ray image sensor with monolithically grown pixelated CsI(Tl) on photosensor area for securing the maximally achievable spatial resolution for a given sensitivity determined by the CsI(Tl) thickness at a certain X-ray energy. The test version of a CMOS image sensor (CIS) was designed and fabricated using AMIS 0.5 mum… (More)

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