Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation

@inproceedings{Li2009DeterminingTE,
  title={Determining the elastic modulus and hardness of an ultra-thin film on a substrate using nanoindentation},
  author={Han Li and Joost J. Vlassak},
  year={2009}
}
A data analysis procedure has been developed to estimate the contact area in an elasto-plastic indentation of a thin film bonded to a substrate. The procedure can be used to derive the elastic modulus and hardness of the film from the indentation load, displacement, and contact stiffness data at indentation depths that are a significant fraction of the film thickness. The analysis is based on Yu’s elastic solution for the contact of a rigid conical punch on a layered half-space and uses an… CONTINUE READING

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