Determination of strain in epitaxial semiconductor layers by high-resolution X-ray diffraction

@article{Vandersluis1993DeterminationOS,
  title={Determination of strain in epitaxial semiconductor layers by high-resolution X-ray diffraction},
  author={P. Vandersluis},
  journal={Journal of Physics D},
  year={1993}
}

Similar Papers

Topics from this paper.