Determination of line edge roughness in low dose top-down scanning electron microscopy images

  title={Determination of line edge roughness in low dose top-down scanning electron microscopy images},
  author={Thomas Verduin and P. Kruit and Cornelis W Hagen},
We investigated off-line metrology for LER determination in low-dose SEM images to reduce the acquisition time and the risk of shrinkage. Our first attempts are based on filtering noisy (experimental) SEM images and use peak detection to measure the edge displacements and calculating the discrete PSD. However, the result of the filtering is that the power spectrum of the filter leaks into the PSD. So it is better to avoid a filter at all. We subsequently developed a method to detect edge… CONTINUE READING


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