Determination of effective attenuation length of slow electrons in polymer films

  title={Determination of effective attenuation length of slow electrons in polymer films},
  author={J. H. Ma and Patrick P. Naulleau and M. Ahmed and Oleg Kostko},
  journal={Journal of Applied Physics},
Author(s): Ma, JH; Naulleau, P; Ahmed, M; Kostko, O | Abstract: © 2020 U.S. Government. Slow electrons (with energy below 10 eV) play an important role in nature and technology. For instance, they are believed to initiate solubility change in extreme ultraviolet resists. Depending on their mobility, such secondary electrons can lead to image blur and degradation of patterning resolution. Hence, it is important to characterize the transport of slow electrons by measuring parameters such as the… 

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