Detection of defects on the surface of a semiconductor by terahertz surface plasmon polaritons.

Abstract

We propose a new method for detecting small defects on the surface of a semiconductor by analyzing the transmission spectrum of terahertz surface plasmon polaritons. The field distributions caused by the detection of defects of different sizes are simulated. Experimentally, using a terahertz time domain spectrometer, we measure the transmission spectrum of… (More)
DOI: 10.1364/AO.55.004139

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