Detection of Single Atoms and Buried Defects in Three Dimensions by Aberration-Corrected Electron Microscope with 0.5-Å Information Limit

@article{Kisielowski2008DetectionOS,
  title={Detection of Single Atoms and Buried Defects in Three Dimensions by Aberration-Corrected Electron Microscope with 0.5-{\AA} Information Limit},
  author={Christian Kisielowski and Bert Freitag and Maarten Bischoff and H van Lin and Sorin Lazăr and G M Knippels and Peter Tiemeijer and Michiel van der Stam and S. von Harrach and Mike Stekelenburg and Maximilian Haider and S. Uhlemann and H. M{\"u}ller and Peter Hartel and Bernd C. Kabius and D. Miller and Ivan Petrov and Eric A Olson and Todor I. Donchev and Edward A. Kenik and Andrew R. Lupini and James Bentley and Stephen John Pennycook and Ian M. Anderson and Andrew M. Minor and Andreas K. Schmid and Thomas Duden and Velimir R. Radmilovi{\'c} and Quentin M. Ramasse and M. Watanabe and Rolf Erni and Eric A. Stach and Peter Denes and Ulrich Dahmen},
  journal={Microscopy and Microanalysis},
  year={2008},
  volume={14},
  pages={469 - 477}
}
Abstract The ability of electron microscopes to analyze all the atoms in individual nanostructures is limited by lens aberrations. However, recent advances in aberration-correcting electron optics have led to greatly enhanced instrument performance and new techniques of electron microscopy. The development of an ultrastable electron microscope with aberration-correcting optics and a monochromated high-brightness source has significantly improved instrument resolution and contrast. In the… Expand
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