Design optimization for an electro-thermally actuated polymeric microgripper

@article{Voicu2008DesignOF,
  title={Design optimization for an electro-thermally actuated polymeric microgripper},
  author={R. Voicu and R. Muller and L. Eftime},
  journal={2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS},
  year={2008},
  pages={182-186}
}
  • R. Voicu, R. Muller, L. Eftime
  • Published 2008
  • Computer Science, Materials Science
  • 2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical instrumentation. In this paper the development of thermal microactuators based on SU-8 polymer is described The paper presents the development of a new microgripper which can realize a movement of the gripping arms with possibility for positioning and manipulating of the… Expand
Review of Electrothermal Actuators and Applications
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