Design of piezoresistive versus piezoelectric contact mode scanning probes

@inproceedings{Doll2010DesignOP,
  title={Design of piezoresistive versus piezoelectric contact mode scanning probes},
  author={Joseph C. Doll and Beth L. Pruitt},
  year={2010}
}
Microfabricated cantilever scanning probes are used for a variety of technological applications. Piezoresistivity and piezoelectricity are two transduction mechanisms that are commonly used to sense cantilever deflection. Despite their widespread use, their performance has not been directly compared to date. In this paper we present detailed models for the noise and sensitivity of both transducer types, design optimized cantilevers via numerical optimization for a variety of use cases, and… CONTINUE READING

Citations

Publications citing this paper.
SHOWING 1-9 OF 9 CITATIONS

Advances in self-sensing techniques for atomic force microscopy

VIEW 3 EXCERPTS
CITES BACKGROUND & METHODS

Electronic scheme for full control of organic piezoelectric MEMS resonators

VIEW 1 EXCERPT
CITES BACKGROUND

MEMS for cell mechanobiology

  • Beth L. Pruitt
  • Biology
  • 2014 IEEE International Electron Devices Meeting
  • 2014

Magnetically actuated resonant piezoresistive microcantilever operating in fluid for dc current measurement

  • Guiming Zhang, Libo Zhao, +4 authors Zhigang Liu
  • Materials Science, Computer Science
  • The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
  • 2013
VIEW 1 EXCERPT
CITES BACKGROUND

High bandwidth piezoresistive force probes with integrated thermal actuation.

  • Joseph C. Doll, Beth L. Pruitt
  • Medicine, Materials Science
  • Journal of micromechanics and microengineering : structures, devices, and systems
  • 2012

References

Publications referenced by this paper.
SHOWING 1-10 OF 79 REFERENCES

Design optimization of piezoresistive cantilevers for force sensing in air and water

  • J CDoll, S JPark, B LPruitt
  • J. Appl. Phys
  • 2009
VIEW 4 EXCERPTS
HIGHLY INFLUENTIAL

Thin Film Piezoelectrics for MEMS

VIEW 4 EXCERPTS
HIGHLY INFLUENTIAL

Aluminum nitride on titanium for CMOS compatible piezoelectric transducers.

Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity

VIEW 1 EXCERPT

Piezoresistive Cantilever Performance—Part II: Optimization

VIEW 2 EXCERPTS

What is the Young’s modulus of silicon

  • M AHopcroft, W DNix, T WKenny
  • J. Microelectromech. Syst
  • 2010
VIEW 1 EXCERPT

Mechanical tension contributes to clustering of neurotransmitter vesicles at presynaptic terminals.

VIEW 1 EXCERPT