Design of low actuation voltage RF MEMS cantilever switch

Abstract

This paper presents the design and RF characterization of micro electromechanical system (MEMS) switches realized on elevated coplanar waveguide for high-speed applications. The capacitive air gap between signal line and the cantilever is 1 um. The lowest actuation voltage obtained is 6 V. The insertion loss of switch and its associated transmission line is -0.31 dB (mainly contributed by the transmission line itself) and the isolation was around -21.67 dB at 40 GHz.

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Cite this paper

@article{Kanthamani2008DesignOL, title={Design of low actuation voltage RF MEMS cantilever switch}, author={S. Kanthamani and S. Raju and V. A. Kumar}, journal={2008 International Conference on Recent Advances in Microwave Theory and Applications}, year={2008}, pages={584-586} }