Design of an ultrasonic tank reactor for copper deposition at electrodes separated by a narrow gap.


This work describes the design and testing of an ultrasonic reactor suitable for processes which require agitation within a narrow gap in a tank geometry. A maskless microfabrication process was used to validate the ultrasonic reactor design. This mask-less electrodeposition method requires the inter-electrode distance between the anode tool and the cathode… (More)
DOI: 10.1016/j.ultsonch.2017.11.038


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